寮哄己鑱旀墜锛侀紟榫欐寮忎笂绾縄CMtia鑱斿悎鍒嗘瀽妫€.娴嬩笌鎶€鏈悎浣滄湇鍔″钩鍙

鎵€灞炲垎绫伙細 濯掍綋鎶ラ亾

鍙戝竷鏃堕棿锛 2025-04-25

姒傝锛 2020骞?鏈?1鏃ヨ捣锛岃仈鍚堝垎鏋愭.娴嬩笌鎶€鏈悎浣滄湇鍔″钩鍙?浠ヤ笅绠€绉帮細鏈嶅姟骞冲彴)姝e紡鍦↖CMtia(闆嗘垚鐢佃矾鏉愭枡浜т笟鎶€鏈垱鏂拌仈鐩?瀹樼綉杩愯浣跨敤銆

 

 

銆€銆€2020骞?鏈?1鏃ヨ捣锛岃仈鍚堝垎鏋愭.娴嬩笌鎶€鏈悎浣滄湇鍔″钩鍙?浠ヤ笅绠€绉帮細鏈嶅姟骞冲彴)姝e紡鍦↖CMtia(闆嗘垚鐢佃矾鏉愭枡浜т笟鎶€鏈垱鏂拌仈鐩?瀹樼綉杩愯浣跨敤銆侟/p>

鈥婞/p>

锛堢偣鍑绘枃绔犱笅鏂?ldquo;闃呰鍘熸枃”鐩磋揪骞冲彴椤甸潰锛堻/strong>

 

銆€銆€鏈嶅姟骞冲彴鏄潗鏂欒仈鐩熺壍澶达紝浼楀鍏卞缓鍗曚綅绉瀬鍙備笌寤鸿鐨勪笓.涓氬寲鏈嶅姟骞冲彴锛屾湇鍔″钩鍙扮潃鍔涗簬鏀堕泦銆佸彂甯冭仈鐩熸垚鍛樻墍灞炰华鍣ㄣ€佽澶囩瓑璧勬簮锛屼互姹傛帹鍔ㄥ浗鍐呭崐瀵间綋琛屼笟鎶€鏈垱鏂板彂灞曘€侟/p>

 

 

銆€銆€榧庨緳浣滀负鍥藉唴CMP鎶涘厜鍨鍩熺殑榫欏ご浼佷笟銆佹潗鏂欒仈鐩熶細鍛樺崟浣嶏紝鏃椾笅鎺ц偂瀛愬叕鍙告箹鍖楅紟姹囧井鐢靛瓙鏉愭枡鏈夐檺鍏徃瀵规绉瀬鍝嶅簲銆侟/p>

銆€銆€婀栧寳榧庢眹寰數瀛愭潗鏂欐湁闄愬叕鍙告槸鍥藉唴鍞?涓€鍏ㄥ埗绋婥MP鎶涘厜鍨緵搴斿晢锛屽浗鍐呭敮.涓€鎷ユ湁鍏抽敭娴囨敞宸ヨ壓鎶€鏈殑鍘傚锛屾嫢鏈夊浗.闄呭寲鐮斿彂鍜岀敓浜у洟闃熴€佷笘.鐣岀骇鍏堣繘杩涘彛鐢熶骇璁惧锛岄珮鏍囧噯鐨勬棤灏樼敓浜ц溅闂村強鍥藉唴鍞?涓€200mm鍜?00mm CMP Pad 璇勪环瀹為獙瀹わ紝寤烘垚浜嗕笌鍥?闄呬竴.娴佸巶鍟嗗悓姝ョ殑鑷姩鍖朇MP鎶涘厜鍨骇涓氬寲鐢熶骇绾裤€傚叕鍙稿叿澶囦簡寮哄ぇ鐨勮嚜涓荤爺鍙戙€佸垱鏂板拰宸ョ▼浜т笟鍖栬兘鍔涳紝浜у搧鏈夐€傜敤浜嶰xide銆乄銆丆u bulk銆佷互鍙夿arrier涓婇€傜敤鐨凜MP Pad;鍚屾椂锛屽叕鍙告嫢鏈夊己澶х殑瀹㈠埗鍖栬兘鍔涳紝鍙牴鎹鎴烽渶姹傚畾鍒跺紑鍙戦€傚悎鍏剁壒娈婇渶姹傜殑浜у搧銆侟/p>

  01

12瀵伏/strong>

鍖栧鏈烘鐮旂(鏈哄彴

AMAT 300 CMP

瀵?2瀵告櫠鍦嗚繘琛屽寲瀛︽満姊扮爺纾ㄣ€侟/p>

 

02  

鍙伴樁浠?/strong>

KLA P-7

瀵?瀵?12瀵伏/p>

wafer dishing/erosion

杩涜妫€娴嬨€侟/p>

 

  03

鍘熷瓙鍔涙樉寰暅

AFM

瀵?瀵?12瀵 wafer琛ㄩ潰褰㈣矊杩涜鎵弿銆侟/p>

04  

姘у寲鐗╄啘鍘氫华

nano spec 鈪狘/p>

瀵?瀵?12瀵 oxide wafer鍘氬害杩涜閲忔祴銆侟/p>

  05

閲戝睘鑶滃帤浠?/strong>

napson RG-300

瀵?瀵?12瀵 copper/tungsten wafer

鍘氬害杩涜閲忔祴銆侟/p>

06  

12瀵告櫠鍦嗙己闄锋壂鎻忔満

AMAT 300 SEM review

瀵?2瀵告櫠鍦嗙己闄疯繘琛宺eview銆侟/p>

  07

12瀵告櫠鍦嗙己闄锋娴嬫満

KLA 300 SP2

瀵?2瀵告櫠鍦嗚繘琛岀己闄锋娴嬨€侟/p>

08  

8瀵伏/strong>

鍖栧鏈烘鐮旂(鏈哄彴

MAT 200 CMP

瀵?瀵告櫠鍦嗚繘琛屽寲瀛︽満姊扮爺纾ㄣ€侟/p>

 

 

 

 

鍏抽敭璇嶏細 寮哄己鑱旀墜锛侀紟榫欐寮忎笂绾縄CMtia鑱斿悎鍒嗘瀽妫€.娴嬩笌鎶€鏈悎浣滄湇鍔″钩鍙

鐩稿叧璧勮

濯掍綋鎶ラ亾

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